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9033644 |
Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
Boom drive apparatus for substrate transport systems and methods are described. The boom drive apparatus is adapted to drive one or more multi-arm robots rotationally mounted to the boom to... |
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9033645 |
Liquid crystal panel transportation device and support arm structure with rotatable ancillary arm sections
Source support arm of a liquid crystal panel transportation device is provided, which includes a primary arm section. The primary arm section includes a plurality of ancillary arm sections that... |
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9028197 |
Robot with plurality of belts and intermediate pulley
A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the... |
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9024488 |
Robot drive with magnetic spindle bearings
A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section... |
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9001422 |
Slide handling system and techniques
In an automated process of handling slides, such as in an imaging system, a slide hander must be able to get a hold of, lift up, and move slides, with tissues samples thereon, to multiple... |
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8998561 |
Gripping device, transfer device, processing device, and manufacturing method for electronic device
According to one embodiment, a gripping device grips a rim of a workpiece by opening and closing gripping plates. The device includes a gripping unit, a hoisting and lowering unit and a motion... |
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8992160 |
Transfer robot
A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in... |
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8985935 |
Mass damper for semiconductor wafer handling end effector
A calibrated mass damper for use with end effectors for semiconductor wafer handling robots is described. The calibrated mass damper reduces vibrational response in an end effector carrying a... |
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8968654 |
Fluid delivery system and lift for use in conjunction therewith
A fluid delivery system includes a laboratory instrument that operates using fluid retained in one or more containers. The containers are supported on a motor-driven lift that is configured to... |
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8961099 |
Dual arm vacuum robot with common drive pulley
A robot for use in semiconductor vacuum chambers is disclosed. The robot may include two independently-driven arms configured for wafer handling. The robot may include three motors or drive... |
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8958907 |
Robot arm apparatus
A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The... |
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8950998 |
Batch substrate handling
A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits... |
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8951002 |
Dual arm robot
A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly. Define at least three degrees of freedom to provide independent... |
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8948904 |
Work picking system
A work picking system according to embodiments includes a three-dimensional measuring unit, a hand, a calculating unit, a determining unit, and an instructing unit. The three-dimensional measuring... |
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8926258 |
Substrate supporting apparatus and substrate transporting apparatus with coupling magnets
A substrate supporting apparatus includes a substrate support that supports a substrate. A first connecting member is connected to the substrate support and includes a first magnet. A second... |
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8920107 |
Substrate support apparatus and vacuum processing apparatus
A substrate support apparatus which can support a substrate having a center hole, comprises a support portion which can support the substrate. The support portion includes a support groove with a... |
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8915693 |
Robot arm having lower arm link separable into two parts
A robot arm for transporting semiconductor wafers includes a hand, a lower arm link, and an upper arm link. The hand is connected to the lower arm link via a first joint, and the upper arm link is... |
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8918203 |
Substrate processing apparatus
A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA... |
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8912697 |
Vacuum actuator including a stator forming a part of a vacuum partition wall
A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet... |
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8897916 |
Maneuvering system having inner force sense presenting function
A compact, lightweight manipulation system that excels in operability and has a force feedback capability is provided. When automatic operation of a slave manipulator 105 that follows manual... |
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8888435 |
Industrial robot with overlapping first hand and second hand during time of linear transport
An industrial robot is provided with the first hand, the second hand, the arm and the main unit section. The base end portion of the first hand and the base end portion of the second hand are... |
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8882430 |
Industrial robot
An industrial robot may include a first hand and a second hand on which an object is mounted, a first arm which turnably holds the first hand on a first end side, a second arm which turnably holds... |
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8870513 |
Vacuum treatment apparatus
A transport arrangement (100) for bi-directionally transporting substrates towards and from a load lock (5) comprises a first substrate handler (1) swivelable about a first axis (A1) and with at... |
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8874258 |
Method for transporting a substrate with a substrate support
A method of transporting a substrate with a substrate support, the method includes defining a frictional breakaway force between the substrate and the substrate support in a horizontal plane,... |
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8863685 |
Device for conveying honeycomb structural body, method for sealing honeycomb structural body, and method for producing honeycomb structural body
A camera is used to take an image of an end surface of a honeycomb structure gripped by a hand. Based on the image, an initial rotation angle of the honeycomb structure around a vertical axis at a... |
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8855872 |
Construction machine
A construction machine includes: a work device; an operation device which receives a manipulation; a hydraulic unit including a hydraulic motor; an electric unit including an electric motor and an... |
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8855817 |
Parts handling device, system and method
A method for operating a system including at least two robots for handling parts and a robot control unit arranged for control of said at least two robots. Each of the robots is arranged with a... |
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8833198 |
Belt-driven robot having extended Z-axis motion
A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is... |
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8807616 |
Robot hand
A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to... |
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8807911 |
Transfer robot and equipment front end module including transfer robot with vent part
A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be... |
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8784033 |
Robot systems, apparatus and methods for transporting substrates
Substrate transport systems, apparatus and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent... |
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8777540 |
Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers
An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed... |
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8777547 |
Systems, apparatus and methods for transporting substrates
A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper... |
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8764085 |
Clamping device and workpiece conveying robot
A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly... |
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8755935 |
Substrate holder positioning method and substrate processing system
A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder... |
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8752449 |
Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms... |
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8747049 |
Transferring apparatus
A transferring apparatus 1 includes a revolving base 13, two hand mechanisms 13 and 14, and two hand drive mechanisms 30 and 40. The hand mechanisms 13 and 14 are provided at a revolving base 13... |
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8747050 |
Substrate transport apparatus
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled... |
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8720297 |
Parallel robot of the SCARA type
A parallel robot of the SCARA type includes a base or a body to which two articulated elements are attached, each including an arm and a forearm that are connected by a joint and are mounted in a... |
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8720965 |
Robot hand and robot
A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least... |
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8701519 |
Robot with belt-drive system
A substrate handling robot having a robot body and a robot arm with an end effector is configured to exhibit angular (θ), radial (R) and Z motion. A pair of coaxial shafts link the robot arm to... |
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8700213 |
Maneuvering system having inner force sense presenting function
A compact, lightweight manipulation system that excels in operability and has a force feedback capability is provided. When automatic operation of a slave manipulator 105 that follows manual... |
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8690516 |
Method of adjusting velocity of transfer member, method of transferring substrate using the method, and substrate-processing apparatus
Provided is a method of adjusting a velocity of a transfer arm in a transfer member. The method includes, accelerating the transfer arm from a start point to a first point where a movement... |
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8672604 |
Industrial robot
An industrial robot includes a hand on which a workpiece is placed, an arm that takes out the hand from a predetermined position of the workpiece and supplies the hand, an up-down moving mechanism... |
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8668428 |
Horizontal articulated robot and substrate transfer system provided with the same
A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a... |
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8668041 |
Construction machine having platform for maintenance work
A construction machine including: a lower propelling body; an upper slewing body having a rear region with an engine room; a slewing device for slewing the upper slewing body; and a platform... |
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8651796 |
Substrate transport apparatus with multiple independently movable articulated arms
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft... |
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8628290 |
Manipulator having a three-ring bearing between two outer pivot arms and a platform
A handling device which has a first bearing device forming a pivot point for two inner pivot arms, to each of which one outer pivot arm is pivotally attached. The two outer pivot arms support a... |
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8606394 |
Robot and conveying system
A robot includes an arm member, a rotary actuator that swings the arm member, a hand member provided at an end of the arm member, a joint member that connects the arm member and the hand member to... |
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8596950 |
Transfer robot
A transfer robot includes a hand section, a horizontal arm mechanism, and a lift mechanism. An object is to be placed on the hand section. The horizontal arm mechanism is connected to the hand... |